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天光一号MOPA系统的预放大器采用双向电子束泵浦KrF准分子激光。它由一个Marx发生器带两个脉冲形成线和两个开关,以形成两个100ns脉宽的高压脉冲加到两个二极管上,产生和引出电子束到激光腔中。为满足泵浦激光要求,两高压脉冲必须同时产生和同时加到两二极
The daylight pre-amplifier of the MOPA system uses two-way electron beam pumping KrF excimer laser. It consists of a Marx generator with two pulses forming a line and two switches to form two 100 ns pulse width high voltage pulses applied to the two diodes to generate and extract the electron beam into the laser cavity. To meet the pump laser requirements, two high-voltage pulses must be generated at the same time and added to both diodes