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IBAD(离子束辅助淀积)是一种很有潜力的材料表面改性和优质薄膜合成技术。本文在论述它在薄膜科学研究中的特点和应用基础上,提出了IBAD技术的开发方向,给出了利用IBAD—PVD复合镀膜技术进行异质材料界面设计和利用IBAD—PVD复合淀积多层膜技术进行CoSi_2薄膜合成的研究实例。这些研究为合成满足需要的优质薄膜提出了优化的技术路线。
IBAD (ion beam assisted deposition) is a promising material surface modification and high-quality thin film synthesis. In this paper, based on the characteristics and applications of thin film science, this paper proposes the development direction of IBAD technology, presents the design of heterogeneous material interface using IBAD-PVD composite coating technology, Membrane technology for CoSi_2 thin film synthesis of examples. These studies propose an optimized technical route for the synthesis of high-quality films that meet the needs.