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提出了一种用于纳米三坐标测量机接触式测头预行程测量的方法.确定了预行程需侦测接触点和触发点两个关键点.为了对该高灵敏度的测头进行标定,整个实验系统需要3个基本条件:纳米级驱动器,高分辨率传感器和多级速度控制算法.本研究使用一种超声波马达HR4在同一平台上实现大行程粗略驱动以及微位移调整.位移测量使用光栅传感器LDGI(linear diffraction grating interferometer),其分辨率可达1nm.在测试过程中采用高速逼近和低速触发,使用“双触发”方式获得触发点位置.接触点位置的侦测使用开关电路.触发信号和位移信号由同一块数据采集卡同步采集.实验表明,使用该方法测量预行程,单方向重复性在±5nm以内.
A method for measuring the contact pre-stroke of a nano-CMM is proposed, and two key points of the pre-stroke detection contact and the trigger point are determined. In order to calibrate the high-sensitivity probe, the whole The experimental system needs three basic conditions: nano-scale driver, high-resolution sensor and multi-level speed control algorithm.In this study, an ultrasonic motor HR4 was used to drive rough travel and micro-displacement of large stroke on the same platform.The displacement measurement using grating sensor LDGI (linear diffraction grating interferometer) with a resolution of 1nm High-speed approximation and low-speed triggering are used during the test, and the triggering point position is obtained using the “double triggering.” The detection of the contact point uses a switching circuit. The signals and displacement signals are collected synchronously by the same data acquisition card.Experiments show that using this method to measure the pre-travel, the unidirectional repeatability is within ± 5nm.