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将利用~(12)C作为轰击粒子的重离子背散射技术与利用α粒予作为轰击粒子的常规背散射技术相比较,讨论了质量分辨率、深度分辨率及分析灵敏度等方面重离子背散射所表现出来的优点,并且利用~(12)C重离子背散射方法分析了YBa_2Cu_3O_7/SrTiO_3界面处元素之间的扩散行为。
Compared with the conventional backscattering technique using α-particle as bombardment particle, the heavy-ion backscattering technique using ~ (12) C as bombarded particles is discussed. The effects of heavy-ion backscattering, such as mass resolution, depth resolution and analytical sensitivity, The diffusion behavior of the elements at the YBa2Cu3O7 / SrTiO3 interface was analyzed by ~ (12) C heavy ion backscattering.