论文部分内容阅读
微电子机械系统与虚拟现实技术都是最新的技术生长点；将此两项技术结合，建立起微机械的虚拟现实系统，无论是对虚拟现实技术的应用，还是对微电子机械系统的发展都具有巨大的意义．本文将ＶＲ技术引入ＭＥＭＳ，给出了微机械的虚拟现实系统体系结构；并在此体系结构基础上提出了微机械操作的多种控制方式
Microelectromechanical systems and virtual reality technology are the latest technology growth point; the combination of these two technologies to establish a micro-mechanical virtual reality system, whether it is the application of virtual reality technology, or the development of micro-electro-mechanical systems are Has great significance. In this paper, VR technology is introduced into MEMS, and the architecture of virtual reality system of micromechanics is given. Based on this architecture, various control methods of micromechanical operation