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采用电子束光刻、热蒸镀和剥离工艺在室温下制备了多组磁性量子元胞自动机器件功能阵列.实验研究了曝光剂量和曝光时间对三个不同间距参数磁性量子元胞自动机阵列图案的影响,发现100 pA电子束束流和0.38μs曝光时间可获得理想的阵列图案.对制备的反相器阵列结构进行了磁力显微测试,结果显示了正确的逻辑功能,成功实现了不同间距参数功能阵列的实验制备.此外.实验还发现纳磁体阵列制备中容易出现缺陷,模拟结果表明丢失纳磁体缺陷导致了信号传递反相.
A series of functional arrays of magnetic quantum cellular automata devices were prepared by electron beam lithography, thermal evaporation and stripping process at room temperature.Experimental study of the effects of exposure dose and exposure time on the magnetic quantum cellular automaton arrays with three different pitch parameters Pattern and found that the ideal patented array pattern was obtained with a 100 pA electron beam and a 0.38 μs exposure time.The magnetic microstructure of the fabricated inverter array structure was tested and the results showed that the correct logic functions were successfully achieved Pitch parameter function array experimental preparation.In addition, the experiment also found that the preparation of nano-magnet array prone to defects, the simulation results show that the loss of nano-magnet defects led to the signal inversion.