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本文比较研究了不同晶粒大小和结构的金刚石薄膜的场发射性质,这些金刚石薄膜通过热丝辅助化学气相沉积法( HFCVD)获得。研究结果表明纳米尺寸效应对金刚石薄膜的场发射性能有非常重要的影响,通过比较不同晶粒尺寸的金刚石薄膜发现纳米金刚石薄膜相对于大晶粒金刚石薄膜(比如微米级的金刚石薄膜)有更好的场发射性能。从拉曼光谱得到,含有一定量非金刚石相的金刚石薄膜有更好的场发射能力和更低的开启电场(E0)。另外,具有(111)定向的金刚石薄膜比起其他结构的金刚石薄膜,它的电子发射能力更强。
In this paper, field emission properties of diamond films with different grain sizes and structures are comparatively investigated. These diamond films are obtained by hot wire assisted chemical vapor deposition (HFCVD). The results show that the nano-size effect has a very important effect on the field emission performance of diamond films. Compared with diamond films with different grain sizes, nano-diamond films show better performance than large-size diamond films (such as micron diamond films) Field emission performance. From Raman spectroscopy, diamond films containing a certain amount of non-diamond phase have better field emission and lower on-field (E0). In addition, a diamond film having a (111) orientation has a higher electron-emitting ability than a diamond film having other structures.