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采用射频化学气相法沉积了氮、硅共掺杂类金刚石碳膜(N-Si-DLC).用X射线光电子能谱仪、拉曼光谱仪、表面形貌仪及扫描电子显微镜等对薄膜结构进行了表征,用球-盘往复摩擦试验机考察了不同湿度(RH为15%,45%和75%)空气中薄膜与316L不锈钢球配副的摩擦学性能.结果表明:与Si-DLC相比,N-Si-DLC膜内sp~2C成分含量较高,N主要以C=N、C≡N、Si-N键形式存在于膜内;膜的内应力低,硬度和杨氏模量较低;含N量少的N-Si-DLC膜显示出更低的摩擦与磨损,其摩擦学性能对湿度的变化表现出较低的敏感性.
The nitrogen and silicon co-doped diamond-like carbon films (N-Si-DLC) were deposited by RF chemical vapor deposition.The structures of the films were characterized by X-ray photoelectron spectroscopy, Raman spectroscopy, surface profilometry and scanning electron microscopy The tribological properties of films with 316L stainless steel balls in air at different humidity (RH 15%, 45% and 75% RH) were investigated by ball-and-disc reciprocating friction tester.The results show that compared with Si-DLC , The content of sp ~ 2C component in N-Si-DLC film is high, N is mainly in the form of C = N, C≡N and Si-N bonds; the internal stress of film is low, the hardness and Young’s modulus Low; N-Si-DLC film containing less N showed lower friction and wear, the tribological properties of the humidity showed a lower sensitivity to changes.