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研究了使用非平衡测控溅射技术沉积的类金刚石(DLC)薄膜其抗激光损伤能力;通过对比施加偏置电场前后薄膜的损伤情况,发现:DLC薄膜施加偏置电场后,薄膜的激光损伤区域内有大量丝状薄膜,损伤形貌存在明显不同,损伤面积减小;薄膜的激光损伤情况得到改善。实验结果显示,外加偏置电场对DLC薄膜的损伤有影响。认为:激光在DLC薄膜中激励产生的光生电子在电场的作用下产生快速漂移,间接降低了激光辐照区域内的局部能量密度,减缓了薄膜的石墨化,提高了DLC薄膜的抗激光损伤能力。
The DLC thin films deposited by unbalanced measurement and control technique were studied for their resistance to laser damage. By comparing the damage of thin films before and after bias electric field, it was found that the laser induced damage There are a large number of filiform thin films, the damage morphology significantly different, lessen the area of damage; thin film laser damage is improved. Experimental results show that the applied bias electric field has an impact on the DLC film damage. It is considered that the photogenerated electrons excited by laser in DLC film produce rapid drift under the action of electric field and indirectly reduce the local energy density in the laser irradiation region, slow the graphitization of the film and improve the anti-laser damage ability of the DLC film .