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借助微透镜及其阵列的光学器件,采用软刻蚀技术中的微模塑方法成功制备了聚甲基丙烯酸甲酯(PMMA)的柱体及球面微透镜阵列,并对该微透镜阵列进行了光学显微和SEM分析.通过考察制备过程中的影响因素,探讨了减少阵列缺陷和提高光学性能的适宜参数.并对该透镜阵列的光学成像性能进行了初步研究.
微模塑法制备PMMA球面微透镜阵列
【摘 要】
：
借助微透镜及其阵列的光学器件,采用软刻蚀技术中的微模塑方法成功制备了聚甲基丙烯酸甲酯(PMMA)的柱体及球面微透镜阵列,并对该微透镜阵列进行了光学显微和SEM分析.通过考察
【机 构】
：
中国科学技术大学高分子科学与工程系
【出 处】
：
化学物理学报
【发表日期】
：
2004年期
【基金项目】
：
教育部高等学校博士学科点专项科研基金;国家自然科学基金
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