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前言过去,半导体器件制造厂家使用的砷化氢、磷化氢气体检测器大部分是化学发光、原子吸光、火焰亮度、光离子等光学方法的检测器。最近,日本开发了叫做隔膜电极法的电化学气体传感器,用于砷化氢和磷化氢气体以及可燃性气体等。在选择检测有毒气体的允许浓度时,采用隔膜电极法的电化学气体传感器比半导体气体传感器性能要佳。一、隔膜电极法传感器种类及用途隔膜电极法传感器种类分: (1)离子电极法(电位检测型); (2)恒电位电解法(电流检测型); (3)伽伐尼电池法(电流检测型)。
Foreword In the past, the majority of arsine and phosphine gas detectors used by semiconductor device manufacturers were detectors of optical methods such as chemiluminescence, atomic absorption, flame brightness and photoionization. Recently, Japan has developed an electrochemical gas sensor called the diaphragm electrode method for arsine and phosphine gases as well as flammable gases and the like. Electrochemical gas sensors using the membrane electrode method perform better than semiconductor gas sensors in selecting the allowable concentration for toxic gas detection. First, the diaphragm electrode sensor types and uses Diaphragm electrode sensor types: (1) ion electrode method (potential detection type); (2) potentiostatic electrolysis (current detection type); (3) Galvanic battery method ( Current detection type).