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MEMS开关是最常见的RF MEMS控制元件,是RF结构中一个关键的MEMS器件。长期可靠性是目前制约MEMS开关商业化进程中的一个主要问题。主要综述了静电式RF MEMS开关可靠性的新进展。欧姆式开关通常由于黏附或接触电阻的增大而失效,电容式开关的主要失效机理则与电介质层的充电有关。接触材料的选择是决定欧姆开关可靠性最重要的一个因素,“主动断开/被动接触”MEMS开关适用于软金属材料欧姆接触的可靠性要求。改善电容式开关可靠性的途径是改善介电层、优化驱动电压波形等以减小介质层的充电。
MEMS switches are the most common RF MEMS control elements and are a key MEMS device in RF structures. Long-term reliability is one of the major issues currently limiting the commercialization of MEMS switches. This paper mainly reviewed the recent development of the reliability of electrostatic RF MEMS switch. Ohmic switches often fail due to increased adhesion or contact resistance, and the primary failure mechanism of capacitive switches is related to charging of the dielectric layer. The choice of contact material is one of the most important determinants of the reliability of an ohmic switch, and the “Active Disconnect / Passive Contact” MEMS switch is used for the reliability requirements of ohmic contacts for soft metal materials. The way to improve the reliability of the capacitive switch is to improve the dielectric layer, optimize the drive voltage waveform and so on to reduce the charge of the dielectric layer.