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长期以来 ,高质量的纯类金刚石薄膜的成功制备一直受其巨大内部压应力的阻碍 ,因为这种压应力导致严重的附着问题。厚度大于 50 0nm的类金刚石薄膜中的压应力常使薄膜与基体剥离。作者采用功能梯度的设计概念 ,应用准分子脉冲激光沉积方法 ,成功制备了厚度超过 1 0 μm的高质量类金刚石薄膜。薄膜中的SP3碳原子含量超过 6 0 %。纳米硬度测试表明 ,薄膜的弹性模量高达 50 0GPa ,纳米硬度高达 6 0GPa ,薄膜与基体间附着良好。证明功能梯度的设计概念可以用于制备较厚的超硬类金刚石薄膜。
The successful preparation of high quality pure diamond films has long been hampered by the enormous internal compressive stress that causes serious adhesion problems. The compressive stress in a diamond-like carbon film having a thickness of more than 500 nm often causes the film to peel off from the substrate. Using the concept of function gradient design, the authors successfully prepared high quality diamond-like carbon films with thicknesses of more than 10 μm using excimer pulsed laser deposition. The SP3 carbon content in the film exceeds 60%. The nano-hardness test shows that the elastic modulus of the film is as high as 50GPa, the nano-hardness is as high as 60GPa, and the adhesion between the film and the substrate is good. The design concept that proved that the function gradients can be used to make thicker superhard diamond-like carbon films.