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感光性抗蚀剂的进展构成印制电路图形所用的抗蚀剂大致可分为丝网印刷油墨和感光性抗蚀剂(光致抗蚀剂)。光致抗蚀剂一般又分为液状抗蚀剂和干膜两种。图14示出了在美国这三种抗蚀剂使用的比例。从图上很明显地看出,丝网印刷油墨约占一半,其余一半是液状抗蚀剂和干膜。干膜使用简单,膜又稳定,正在迅速普及,而液状抗蚀剂的情况也在发生变化。干膜一般使用三氯乙烯这样的有机溶剂显影。从安全卫生出发,最近正在普遍使用碱溶液显影。液状抗蚀剂有负相型和正相型。在日本用的是负相型,而美国多数使用正相型。正相型的优点是:(1)灰尘等对图形的断线和缺陷没
Progress in Photosensitive Resists Resists used in forming printed circuit patterns are broadly classified into screen printing inks and photosensitive resists (photoresists). Photoresists are generally divided into two types of liquid resist and dry film. Figure 14 shows the proportions of these three resists used in the United States. It is clear from the figure that about half of the screen printing ink, the remaining half is a liquid resist and dry film. Dry film is simple to use, the film is stable, is rapidly gaining popularity, and the situation of liquid resists is changing. Dry film generally use trichlorethylene such organic solvent development. Starting from safety and health, alkaline solution development is commonly used recently. Liquid resist has negative phase type and positive phase type. In Japan, the negative phase type is used, while the majority in the United States uses positive phase type. Positive phase of the advantages are: (1) dust and other graphics on the break and defects did not