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本文简述了离子注入技术的特点、原理和装置;介绍了目前国内外离子注入机的类型和主要参数;详细地综述了离子注入技术在提高金属材料表面的机械性能(如硬度、耐磨性能、耐疲劳性能等)、抗氧化和耐腐蚀性能等方面的工艺、效果及其工业应用实例;阐明了这种新技术为金属材料科学、固体化学及腐蚀科学等科学领域的理论与应用的研究开辟了一条新的途径;指出了离子注入技术正在朝与气相沉积-电子束技术以及激光表面强化等新技术相互渗透与结合的方向发展。实践证明,离子注入技术是一种多功能的、并兼有理论研究和工业应用两方面发展前景的新技术。
In this paper, the characteristics, principle and device of ion implantation are briefly introduced. The types and main parameters of ion implanter at home and abroad are introduced. The ion implantation technology is reviewed in detail to improve the mechanical properties (such as hardness, wear resistance , Fatigue resistance, etc.), anti-oxidation and corrosion resistance and other aspects of the process, effects and industrial application examples; clarified the new technology for the metal material science, solid chemistry and corrosion science and other scientific fields of theory and application of Opens up a new way; points out that the ion implantation technology is moving towards the mutual infiltration and combination with new technologies such as vapor deposition-electron beam and laser surface strengthening. Practice has proved that ion implantation technology is a multi-functional, and both theoretical research and industrial applications both prospects for the development of new technologies.