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在水平管式炉中,采用热蒸发锌粉的方法,在镀有掺铝氧化锌(AZO)薄膜的石英基片上制备了大量高密度的ZnO纳米棒,AZO膜面分别正对和背对锌源。利用扫描电子显微镜、X射线衍射仪以及荧光光谱仪分析AZO膜面朝向对ZnO纳米棒的形貌、微结构及光学性能的影响。结果表明,不同朝向的AZO膜面上所生长的纳米棒具有相似的形貌和微结构。保温时间10min样品的氧空位的缺陷态发光为绿光,强度较强;保温时间15min样品的纳米棒长度较长、相对垂直衬底,其近带边发光较强,氧间隙的缺陷态发光较弱。正对锌源衬底上且保温时间15min样品的近带边发光最强,且缺陷态发光最弱。
In a horizontal tube furnace, a large number of high-density ZnO nanorods were prepared on a quartz substrate coated with an aluminum-doped zinc oxide (AZO) film by thermal evaporation of zinc powder. The AZO film surfaces were opposite to and opposite to the zinc source. The effects of AZO film orientation on the morphology, microstructure and optical properties of ZnO nanorods were analyzed by scanning electron microscopy, X-ray diffraction and fluorescence spectroscopy. The results show that nanorods grown on AZO films with different orientations have similar morphologies and microstructures. When the holding time is 10min, the defect state of the oxygen vacancy of the sample is glowed green and the intensity is strong. The longer the length of the nanorods is, the shorter the edge of the nanorods is. weak. At the edge of the zinc source substrate and the holding time of 15 min, the near-band edge of the sample is the strongest and the defect state is the weakest.