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本文介绍了厚度为５．２～６．０、１０～１３、１９μｍ，有效面积为２８～１５４ｍｍ￣２的外延硅ｄＦ／ｄＸ探测器的研制工艺，主要用途、测试结果（对９．８７Ｍｅｖα粒子的能损ＡＥ的分辨为５６～１２８ｋｅｖ）和在核物理实验中的应用。
This paper introduces the development process of the epitaxial silicon dF / dX detectors with thickness of 5.2-6.0,10-13 and 19μm and effective area of 28-154mm2. The main application and test results (for 9.87Mevα particles Can damage the AE resolution of 56 ~ 128kev) and in nuclear physics experiments.