小型自冷式油扩散泵

• 作 者: 张淑贞 陈在群 蔡敏
• 机 构: 中国科技大学基础物理中心,中国科技大学基础物理中心,中国科技大学基础物理中心,
• 出 处: 物理实验
• 发表日期: 1993年05期
• 关键词: 油扩散泵 自冷式 多级泵 机械泵 高真空 玻璃管 封接 电热丝 槽底部 成圆形

在真空实验中,要想使系统获得高真空(10~(-2)Pa以下的气压),除用机械泵对系统进行排气外还必须加高真空泵,其中最常用的就是扩散泵。一般商品扩散泵都是多级泵,是由几个单级泵串联而成。泵的外形有立式、卧式;泵体材料有玻璃的、金属的;使用的工作液有汞、油等。但它体积大、自身重、需水冷,如果被排气的系统或容器容积不大,使用这种扩散泵无论从经济上还是从实用上考虑都显得大才小用。我们在实验中使用自己设计制做的二级自冷卧式玻璃油扩散泵。它的结构如图1所示,此扩散泵

In vacuum experiments, in order to obtain high vacuum (less than 10 ~ (-2) Pa), the vacuum pump must be lifted in addition to the mechanical pump to vent the system. The most common one is the diffusion pump. General commodity diffusion pumps are multi-stage pumps, which are made up of several single-stage pumps in series. Pump shape vertical, horizontal; pump material glass, metal; working fluid used mercury, oil and so on. But it is bulky, self-weight, water-cooled, if the exhaust system or container volume is not large, the use of such a diffusion pump in terms of both economic and practical considerations seem great. We use our own design in the experiment made of two self-cooling horizontal glass oil diffusion pump. Its structure is shown in Figure 1, this diffusion pump