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用JT-1图示仪测试晶体管的各种参数,是人们早已熟悉的了。我们将JT-1图示仪稍做改动(只焊开一个接点,加入一只扭子开关)就可以用它做三探针测量外延片电阻率。特点是灵敏度高,电压读数精确,电压范围宽,同时还能清楚地观察出击穿特性曲线并可以测出漏电电流,效果令人十分满意。因此,在半导体器件和半导体材料生产中,用一台图示仪既能测试晶体管特性同时又能测外延片的电阻率,是非常方便实用的。
With JT-1 graphical instrument to test the various parameters of the transistor, it has long been familiar with the. We will JT-1 diagram a little change (only a solder joint open a twist switch) can be used to do three probes to measure the epitaxial sheet resistivity. Features are high sensitivity, accurate voltage readings, a wide voltage range, while clearly observed breakdown characteristic curve and leakage current can be measured, the effect is very satisfactory. Therefore, in the production of semiconductor devices and semiconductor materials, the use of a pictorial instrument can not only test the transistor characteristics while measuring the resistivity of the epitaxial wafer, is very convenient and practical.