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研究了一种基于多模干涉器结构的聚合物波导加速度传感器。根据多模干涉器的自映像原理,输入光场受到加速度作用与干涉区产生相对位移,各模式激励系数发生改变,导致输出场强的变化,从而测得加速度。加速度传感器的悬臂梁形变通过有限元方法进行仿真分析,多模干涉器的光传输性能通过束传播法仿真分析,优化了结构和光学性能。
A polymer waveguide accelerometer based on multimode interferometer structure is studied. According to the self-imaging principle of multi-mode interferometer, the input light field is affected by acceleration and the relative displacement of the interfering region, the excitation coefficient of each mode changes, resulting in the output field strength changes, and thus the acceleration. The cantilever beam deformation of accelerometer is simulated by finite element method. The optical transmission performance of the multimode interferometer is simulated by beam propagation method to optimize the structure and optical performance.