Theoretical Consideration on Interaction of Electron Beam With the Target in Scanning Electron Micro

• 作 者: Koichi Kanaya
• 机 构: Kogakuin University 1-24-2,Nishishinjuku,Shinjukuku,Tokyo,Japan,
• 出 处: 电子显微学报
• 发表日期: 1988年04期
• 关键词: Electron penetration exponential subsequent normalized directions radius collisi

The penetration and energy loss characteristics of an electron probe with ener-gies 0.1 and 10~3 keV in solid targets are derived using the potential function of thepower and exponential forms.

The penetration and energy loss characteristics of an electron probe with ener-gies 0.1 and 10 ~ 3 keV in solid targets are derived using the potential function of the power and exponential forms.