Study on Design and Fabrication of Micro Thermal Control Louvers

• 出 处: 稀有金属材料与工程
• 发表日期: 2011年S4期
• 关键词: magnetron sputtering fabrication prototype dimensions processed torsion coated u

A micro thermal control device with polyimide based micro louver was proposed.The device structure was designed,the actuation voltage was analyzed theoretically and fabrication process was described.The micro louver prototype was fabricated using UV laser micromachining,electrochemistry etch and magnetron sputtering deposition technologies.The main parameters were tested and results were presented.

A micro thermal control device with polyimide based micro louver was proposed. The device structure was designed, the actuation voltage was analyzed theoretically and fabrication process was described. Micro louver prototype was fabricated using UV laser micromachining, electrochemistry etch and magnetron sputtering deposition technologies. The main parameters were tested and results were presented.