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为了解决现有坐标测量机中的单目显微视觉测头视场小和景深小的缺点,提出了显微视觉测头的动态测量方法。建立了运动模糊图像的复原模型以及序列图像的全景组合模型,并提出了测量系统的自标定方法,标定重复性精度优于0.5nm。实验证明:该系统在以6mm/s的速度扫描测量时,测量重复性精度可达到5μm。
In order to solve the shortcoming of small field of view and small depth of field of monocular microscopic visual probe in the existing coordinate measuring machine, a dynamic measurement method of microscopic visual probe is proposed. A restoration model of motion blurred image and a panoramic combination model of sequence image are established. A self-calibration method of measurement system is proposed. The calibration repeatability is better than 0.5 nm. Experiments show that: The system at a speed of 6mm / s scan measurement, the measurement repeatability of up to 5μm.