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采用微电子加工工艺在高电阻率硅片上设计和制备了微小双波段分形天线,测试得到天线基本为全向辐射,增益为2.5dBi,谐振频率分别为6.9GHz和21.7GHz,反射系数分别为22dB和32dB,此天线的设计制造利于IC集成。文章还重点对天线的制作工艺进行了详细地介绍,对于以后此类研究具有一定的参考价值。
A micro dual-band fractal antenna was designed and fabricated on high resistivity silicon wafer by microelectronics processing. The antenna was basically omni-directional radiation with a gain of 2.5dBi and resonant frequencies of 6.9GHz and 21.7GHz respectively. The reflection coefficients were 22dB and 32dB, the design and manufacture of this antenna is conducive to IC integration. The article also focuses on the antenna manufacturing process described in detail for the future of such research has some reference value.