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克服了真空石墨电弧沉积过程中的一些难点,成功地利用真空阴极电弧沉积法制备了类金刚石膜,并对其表面形貌、硬度及结合强度、结构进行了分析,结果表明,真空阴极电弧沉积法是制备综合性能良好的光亮类金刚石膜的有效方法．类金刚石膜为非晶结构,具有明显的sp3结构特征．
Overcomes some difficulties in vacuum graphite arc deposition process and successfully prepares a diamond-like carbon film by vacuum cathodic arc deposition method. The surface morphology, hardness and bonding strength and structure of the diamond-like carbon film are analyzed. The results show that the vacuum cathodic arc deposition Method is to prepare a good overall performance of bright diamond-like film an effective method. Diamond-like carbon films are amorphous and have obvious sp3 structure.