论文部分内容阅读
题 目 作 者 期●论文及研制报告0静电磁场中存在悬浮电磁导体时的三维场计算…………吕婷婷、陈抗生 l电子束曝光机电定位控制系统脱机连调初探………………………邱小莎 1离子注入机的EMC技术研究………………………………………陈毅功 1离子注入机的柬断系统…………………
Title Author Period ● Papers and Research Report 0 Three-dimensional Field Calculation of Suspended Electromagnetic Conductors in Electrostatic Field ....................... Lv Tingting, Chen Kangsheng l Introduction of Electron Beam Exposure Electromechanical Positioning Control System for Offline Connection ........................ ... Qiu Xiaosha 1 Ion Implantation Machine EMC Technology ............................................. Chen Yigong 1 ion implanter broken system .....................