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扫描探针电子能谱学是正在发展中的一种结合了扫描隧道显微技术的电子能谱学技术,可以原位地获得固体表面的形貌和能谱信息。本文针对新研制的扫描探针电子能谱仪专门设计制作了一台采用横向隧道结结构、小巧紧凑、稳定对称的扫描隧道显微镜,可以工作在隧道区测量样品表面形貌,也可以在近场发射区测量表面背散射电子能谱。在高定向热解石墨和石墨基底上蒸镀的银膜样品的得到的原子分辨、纳米结构图像和原位电子能量损失谱表明这两种功能已完全实现。
Scanning Probe Electron spectroscopy is an emerging electron spectroscopy technique that incorporates scanning tunneling microscopy to obtain morphological and spectral information of solid surfaces in situ. In this paper, a newly designed scanning probe electron spectrometer has been specially designed and manufactured using a transverse tunnel junction structure, compact, stable and symmetric scanning tunneling microscope can work in the tunnel area to measure the sample surface morphology, but also in the near field Emission area Measurement of surface backscattered electron energy spectra. The resulting atomic resolution, nanostructure images and in situ electron energy loss spectra of silver film samples deposited on highly oriented pyrolytic graphite and graphite substrates indicate that both of these functions have been fully realized.