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KrF准分子激光放大器LLG50需波长为248.5nm的入射种子光,对TSA飞秒前端输出能量为～10mJ、波长～746nm、带宽～12nm、脉宽～100fs的激光进行三倍频。为使三倍频后的激
The KrF excimer laser amplifier LLG50 requires incident seed light with a wavelength of 248.5 nm to triplay the laser with an energy output of ~10 mJ, a wavelength of ~746 nm, a bandwidth of ~12 nm and a pulse width of ~ 100 fs at the front end of the TSA femtosecond laser. In order to make Triple Frequency excited