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研究了一种利用一般原子力显微镜(AFM)实现简便高效纳米操作的方法。利用AFM的成像功能及AFM探针的刻划功能,记录并测量压电陶瓷管(PZT)在X和Y两个方向的位移特性,解决了一般AFM无法检测自身PZT在X和Y两个方向位移的问题;采用PrandtlIshlinskii(PI)模型对PZT的迟滞非线性特性进行建模并建立前馈控制器,以解决AFM探针任意运动路径的驱动问题;采用虚拟纳米手策略对AFM探针的运动路径进行设计,通过构建的前馈控制器驱动AFM探针,完成了15μm×15μm范围内对直径200 nm聚苯乙烯颗粒的连续折线推动,并对长约1.3μm的银棒进行了固定姿态连续平移操作,推动距离超过5μm,整个过程因减少了局部扫描环节而使平均单次操作时间减小到10 s以内。
A method of simple and efficient nano-manipulation using general atomic force microscope (AFM) was studied. Using the imaging function of AFM and the scoring function of AFM probe, the displacement characteristics of piezoelectric ceramic tube (PZT) in both X and Y directions are recorded and solved. The general AFM can not detect its own PZT in both X and Y directions The nonlinear model of PZT was modeled by PrandtlIshlinskii (PI) model and the feedforward controller was built to solve the problem of driving the arbitrary motion path of the AFM probe. The virtual nano hand strategy was used to measure the movement of the AFM probe The AFM probe was driven by the built-in feedforward controller to achieve the continuous polygonal movement of 200 nm diameter polystyrene particles in the range of 15μm × 15μm. The silver rods with the length of about 1.3μm were fixed in attitude Translation operation, the promotion of the distance of more than 5μm, the whole process due to the reduction of the local scan link and the average single operation time is reduced to 10s or less.