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建立了气体放电阴极鞘层离子的自洽蒙特卡罗模拟模型，考虑了离子与中性原子的电荷交换碰撞和弹性散射，用到了精确依赖于离子能量的电荷交换和动量输运截面。模拟了氩离子在阴极鞘层中的运动，得到了不同气压下自治电场分布，离子的能量分布和角分布，发现：离子由鞘层边界向阴极运动过程中，离子能量分布的高能部分逐渐增大，角分布向小角度部分压缩，鞘层中的强电场加速和聚焦了离子；在鞘层边界附近的电场呈非线性。
A self-consistent Monte-Carlo simulation model of gas sheathing cathode sheath ion was established. Charge-exchange collisions and elastic scattering of ion-neutral atoms were considered, and the charge exchange and momentum transport cross-sections were precisely dependent on the ion energy. The movement of argon ions in the cathode sheath was simulated and the distribution of the autonomous electric field and the energy distribution and angular distribution of the ions under different pressures were obtained. It was found that during the movement of the ions from the sheath boundary to the cathode, the high energy part of the ion energy distribution gradually increased Large and angular distribution of the small angle part of the compression, a strong electric field in the sheath to accelerate and focus on the ion; near the sheath boundary is nonlinear electric field.