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SnO_2 thin film sensors were fabricated by a thermal evaporation method.The sensors were heated for thermal oxidation.For high porosity,SnO_2 thin film sensors were treated in a N_2 atmosphere.The sensors that were treated with O_2 after being treated with N_2 showed 70 % sensitivity for 1×10~ -6) of H_2S,which is higher than the sensors that were only treated with O_2.The Ni metal,as a catalyst,was evaporated on the thin film Sn on the Al_2O_3 substrate.The sensor was heated to grow the Sn nanowire in a tube furnace with N_2 flow.Sn nanowire was heated for oxidation.The sensitivity of SnO_2 nanowire sensor was measured for 500×10~ -9) of H_2S.The selectivity of the SnO_2 nanowire sensor was compared with the thin film and the thick film SnO_2.Each sensor was measured for H_2S,CO,and NH_3 in this study.
SnO_2 thin film sensors were fabricated by a thermal evaporation method. The sensors were heated for thermal oxidation. For high porosity, SnO_2 thin film sensors were treated in a N_2 atmosphere. These sensors that were treated with O_2 after being treated with N_2 showed 70% sensitivity for 1 × 10 -6) of H 2 S, which is higher than the sensors that were only treated with O 2. The Ni metal, as a catalyst, was evaporated on the thin film Sn on the Al 2 O 3 substrate. The sensor was heated to grow the Sn nanowire in a tube furnace with N_2 flow. Nanowire was heated for oxidation. The sensitivity of the SnO_2 nanowire sensor was measured for 500 × 10 ~ -9) of H_2S.The selectivity of the SnO_2 nanowire sensor was compared with the thin film and the thick film SnO_2.Each sensor was measured for H_2S, CO, and NH_3 in this study.