论文部分内容阅读
瑞奇 康芒法是检测大口径平面时的行之有效的方法。由于被检平面处于发散光路中,这就使得平面面形与系统波像差之间的关系(即影响函数)变得十分复杂,推导起来十分困难,故长期以来该方法只能作为一种定性或半定量的检测手段。给出了数学算法,推导出了被检平面镜面形误差与检验系统波像差之间的相互关系,实现了瑞奇 康芒的定量检测。
Ricky Kang Mans method is to detect large-diameter plane when the effective method. Since the plane to be inspected is in the divergent light path, this makes the relationship between the plane surface shape and the system wave aberration (ie, the influence function) complicated and inferred very difficult. Therefore, this method has long been used only as a qualitative Or semi-quantitative detection means. A mathematical algorithm is given, and the relationship between the specular error of the plane under inspection and the wave aberration of the inspection system is deduced. The quantitative detection of Ricky Kangmang is achieved.