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以功率约为30 kW,中心波长为3 8μm,出光时间为1 s的连续DF化学激光器作为抽运源,在抽运光共轴近正入射于圆形反射镜条件下,利用夏克哈特曼(Shack-Hartmann)波前传感器,对不同工艺条件下镀制的3 8/0 633μm双波段多层膜强激光反射镜的热畸变量进行了检测.基于热传导方程和热弹方程,在考虑到空气折射率热效应基础上,利用有限元分析方法,完成了对不同反射镜热吸收的评价.结果表明,在目前最好的工艺参数控制条件下,所镀制的反射镜的热吸收率接近于80×10-6.从而在膜层材料及膜系设计结构均完全相同的前提下,达到了评价及优化膜系镀制工艺的目的.
A continuous DF chemical laser with a power of about 30 kW, a central wavelength of 38 μm, and a light output time of 1 s was used as a pumping source. Under the condition that the pumping light is incident on a circular mirror approximately co-axially, (Shack-Hartmann) wavefront sensor was used to measure the thermal distortion of 3 8/0 633μm dual-band multilayered film intense laser mirror coated with different process conditions.Based on the heat conduction equation and the thermo-elastic equation, Based on the thermal effect of air refractive index, the heat absorption of different mirrors was evaluated by the finite element analysis method.The results show that under the best control of the process parameters, the heat absorption rate of the coated mirrors is close to At 80 × 10-6. Thus under the premise of the film material and film design structure are exactly the same, to achieve the purpose of evaluation and optimization of film plating process.