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针对惯性约束聚激光装置终端光学系统中使用的大口径超薄晶体的面形畸变,探索了一种低应力新型夹持方法——四周回形全紧固夹持法。从谐波转换模型和晶体准直两方面进行了分析,表明晶体面形畸变将降低三倍频效率和导致准直光斑弥散,并提出了晶体面形总畸变小于5μm和晶体装夹畸变小于加工畸变的两项控制目标。再根据力学模型,设计了四周回形全紧固夹持法的精密装配结构,并对该结构进行了精密加工控制和有限元分析,以及实验验证。验证结果表明,利用低应力新型夹持方法,晶体装配后的总面形畸变小于5μm,说明该方法能够满足晶体的面形畸变控制目标。
Aiming at the surface distortion of the large-diameter ultra-thin crystal used in the optical system of inertial confinement laser device, a new low-stress clamping method-all-around clamping full clamping method was explored. The harmonic transformation model and the crystal collimation are analyzed. The results show that the crystal distortion will reduce the triple frequency efficiency and lead to the dispersion of the collimated light spot. The total distortion of the crystal face is less than 5μm and the distortion of crystal clamping is less than the processing Distortion of the two control objectives. According to the mechanics model, the precision assembly structure of all-around clamp-shaped clamping method was designed, and the precision machining control, finite element analysis and experimental verification of the structure were carried out. The verification results show that the total surface distortion after the assembly of the crystal is less than 5μm with the new low-stress clamping method, which shows that this method can meet the control of the planar distortion of the crystal.