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该课题是机电部电科院预研项目,采用PECVD法和APCVD法分别研制出性能优良的氧化铁酒敏材料和烟敏材料,与会专家们一致认为:1.采用了新的制备方法,改变了过去采用的烧结制备方法,因而有工艺简单、重复性好、适于批量生产、易与集成电路工艺兼容等特点;2.用PECVD法制备的酒敏材料灵敏度很高、选择性好、响应恢复时
The subject is the Electrical and Mechanical Research Institute of Electric Power Research Institute pre-project, the use of PECVD method and APCVD were developed excellent performance of iron oxide alcohol-sensitive materials and smoke-sensitive materials, participating experts agreed that: 1. Using a new preparation method to change The sintering preparation method adopted in the past has the advantages of simple process and good repeatability, is suitable for mass production, is easy to be compatible with the integrated circuit technology, etc. 2. The alcohol sensitive material prepared by the PECVD method has high sensitivity, good selectivity and response When restored