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A single-particle microbeam facility has been constructed at the Laboratory ofIon Beam Bioengineering (LIBB),Chinese Academy of Sciences. The system is designed to deliver the defined number of hydrogen ions, covering a range of energy from 1.0 to 3.5 MeV, into an area smaller than the nuclei of individual living cells. Accuracy of the particle detection system and the cell targeting system in the facility has been assessed using CR39 (nuclear track detector) for 2.3 MeV protons. The results demonstrate that the particle detection efficiency is above 98%,and the overall targeting accuracy of the microbeam is limited within 3μm for more than 90% hits.