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一、前言 硅压阻式压力传感器是利用单晶硅的压阻效应制成的一种新型压力传感器。这种压阻效应早在三四十年代已被发现,但由于涉及到各种技术问题,特别是半导体工艺和集成电路工艺问题所以一直得不到发展,到了航空测试设备发展受到传感器影响时,这一问题又引起国际航空界人士的重视。此后,人们对半导体锗和硅的
I. Introduction Silicon piezoresistive pressure sensor is the use of single-crystal silicon piezoresistive effect made of a new type of pressure sensor. This piezoresistive effect was discovered in the 1930s and 1940s but has not been developed due to various technical problems, especially the semiconductor process and integrated circuit technology. When the development of aviation test equipment is affected by sensors, This issue has drawn the attention of the international aviation community. Since then, people have been concerned with semiconductors germanium and silicon