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基片负偏压增加，使等离子体增强磁控溅射离子镀TiN涂层的相组成朝着富氮相及其含量增加的方向发展；由Ti2N和TiN两相组成的涂层硬度最高，可达Hk2460。切削力测定表明，由Ti2N和TiN两相组成的刀具涂层使切削力略有下降。涂层能明显提高刀具耐用度。
The negative bias of substrate increases, the phase composition of plasma-enhanced magnetron sputtered ion-plating TiN coating toward the nitrogen-rich phase and the content of the increase; the coating composed of two phases of Ti2N and TiN has the highest hardness, Up to Hk2460. Cutting force measurement showed that the cutting force composed of Ti2N and TiN coating decreased slightly. Coating can significantly improve tool life.