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变形反射镜作为超分辨成像系统中的光瞳滤波器,可以灵活快速地调制光场相位的性能。采用遗传算法设计具有不同超分辨参数的光瞳相位结构,通过修改自适应光学系统闭环参考矩阵实现对光瞳滤波器相位的闭环拟合。在此基础上,实验对比了不同光瞳滤波情形下的超分辨成像效果。结果表明,变形反射镜可以很好地拟合设计的光瞳滤波器相位,超分辨成像参数与理论设计值基本吻合。由于变形反射镜采用反射式并通过控制镜面面形进行超分辨光瞳相位拟合,在使用时对入射光无偏振态要求,有利于该方法的实际应用。
As a pupil filter in super-resolution imaging system, the deformable mirror can flexibly and quickly modulate the phase of light field. Using the genetic algorithm to design the pupil phase structure with different super-resolution parameters, the closed-loop fitting of the pupil filter phase is achieved by modifying the closed-loop reference matrix of the adaptive optics system. On this basis, we compared the super-resolution imaging effects under different pupil filtering experiments. The results show that the deformable mirror can well fit the designed pupil filter phase, and the super-resolution imaging parameters are in good agreement with the theoretical design values. Since the deformable mirror adopts reflection and super-resolution pupil phase fitting by controlling the mirror surface shape, there is no requirement for the polarization state of the incident light during use, which is in favor of the practical application of the method.