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研究了一种线性周期编码光栅的三维轮廓术,其中采用了两个相位相反的线性周期变化的光栅光场和一个均匀光场,对被测物体进行三次采样。在获得物体三维轮廓的同时,又获得了物体的表面纹理。当背景光很暗时,经过两次采样即可获得物体的三维轮廓。通过理论分析,采用相位相反的线性周期光栅光场与相位相差1/2周期的线性周期光栅光场相比,检测精度可以提高近1 倍。
A three-dimensional profilometry of linear periodic coding grating is studied, in which two linear grating grating optical fields and a uniform optical field with opposite phases are used to sample the object three times. Obtained in the three-dimensional contour of the object at the same time, obtained the object’s surface texture. When the background light is dark, three-dimensional contours of the object are obtained by sampling twice. The theoretical analysis shows that the detection accuracy of the linear periodic grating with the opposite phase can be nearly double that of the linear periodic grating with the phase difference of 1/2 cycle.