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采用热壁低压ＭＯＣＶＤ方法制备出了ＴｉＯ２纳米粉末。采用Ｒａｍａｎ散射、Ｘ射线衍射和透射电子显微镜等技术研究了载气流量稳定性、沉积温度和载气流量对ＴｉＯ２纳米粉末的晶体结构、粒度及其分布的影响规律。研究结果表明，当沉积温度为６００℃～１０００℃时，ＴｉＯ２粉末均为锐钛矿结构，载气流量不稳定容易使ＴｉＯ２粉末中出现大颗粒，载气流量的降低有利于ＴｉＯ２纳米粉末的平均颗粒尺寸减小，可以使粒度分布更加均匀。
The TiO2 nanopowder was prepared by hot wall low pressure MOCVD. The effects of carrier gas flow stability, deposition temperature and carrier gas flow rate on the crystal structure, particle size and distribution of TiO2 nanopowders were studied by Raman scattering, X-ray diffraction and transmission electron microscopy. The results show that when the deposition temperature is 600 ℃ ~ 1000 ℃, the TiO2 powders are anatase structure, the carrier gas flow instability easy to make large particles appear in the TiO2 powder, carrier gas flow rate is conducive to the average TiO2 nanoparticles Particle size reduction, can make the particle size distribution more uniform.