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通过对压电移相器在微位移过程中端面旋转的数学建模,对其空间旋转误差进行了理论分析;基于该数学模型,利用泰曼-格林干涉系统对两种不同工艺制作的移相器进行了在线检测,根据干涉条纹的旋转及间距变化,可以定量分析高精度移相器在微位移移相过程中其端面的旋转角度以及空间任意点的位移误差,并给出了相关实验结果。表明:用该方法在线检测各种不同工艺制作的移相器,对其端面上任意点由于端面旋转引起的空间位移误差检测灵敏度达到pm量级,在0～100V驱动电压范围内进行在线移相检测,实验测量移相器的位移精度优于λ/200,对应相移精度高于0.06rad。
Through the mathematical modeling of the end face rotation of the piezoelectric phase shifter during the micro-displacement process, the spatial rotation error is theoretically analyzed. Based on the mathematical model, the phase shifting of the two different technologies by using the Tehman-Green interfering system Based on the rotation and pitch variation of interference fringes, the rotation angle of the end face and the displacement error at arbitrary point of the high-precision phase shifter can be quantitatively analyzed. The experimental results . It shows that this method can detect on line the phase shifter made by different kinds of processes and the detection sensitivity of spatial displacement error at any point on the end face due to the end face rotation reaches the order of pm and carry out the online phase shift within the driving voltage range of 0-100V Detection, experimental measurement phase shifter displacement accuracy better than λ / 200, the corresponding phase shift accuracy higher than 0.06rad.