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压电薄膜涂层换能器是在非压电基片上产生和检测声表面波的最有效途径。氧化锌是一种很合适的压电薄膜涂层材料,它有很强的压电效应,并且容易使它成为定向晶体而溅射在各种基片上。本文概述优质氧化锌薄膜涂层换能器的特性,着重讨论它的溅射参数和微观结构特性。这种微观结构特性表明,氧化锌薄膜是优越的表面波换能器材料。溅射的必要条件是:高的基片温度(150-300℃),缓慢的淀积速率(0.5-1.0微米/小时),低的气氛气压(小于5微米汞柱)及超纯净的真空系统。优质表面波换能器薄膜有下述特性:洁净透光,致密,表面光滑,晶粒细,晶轴取向良好。这种氧化锌薄膜将在今后的声表面波器件工艺中发挥重大的作用。
Piezoelectric thin film coated transducers are the most effective way to create and detect SAW on non-piezoelectric substrates. Zinc oxide is a very suitable piezoelectric thin film coating material, it has a strong piezoelectric effect, and easy to make it as a directional crystal and sputtering on a variety of substrates. This article outlines the characteristics of high quality zinc oxide film coated transducers, focusing on its sputtering parameters and microstructural properties. This microstructure characteristic indicates that zinc oxide film is a superior surface wave transducer material. The necessary conditions for sputtering are high substrate temperature (150-300 ° C), slow deposition rate (0.5-1.0 μm / hr), low atmosphere pressure (less than 5 μm Hg) and ultrapure vacuum system . High-quality surface wave transducer film has the following characteristics: clean and transparent, dense, smooth surface, fine grain, crystal axis orientation. This zinc oxide film will play a significant role in the future of surface acoustic wave device technology.