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介绍了一种超高真空精确校准技术。该技术依赖磁悬浮转子规 ,因此具有简单、实用、不确定度小等优点。给出了用该技术校准分离规的实验结果。
An ultra-high vacuum precision calibration technique is introduced. The technology relies on magnetic rotor rotor gauge, so it has the advantages of simple, practical, small uncertainty and so on. The experimental results of using this technique to calibrate the separation rules are given.