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日本EBV-6DA型镀膜机是光学镀膜专用的现代化镀膜机。它采用了全自动程序控制的抽气系统;膜厚及速率自动控制系统;剩余气体质谱分析系统等先进技术和一系列安全保护系统。1979年我所进口了一台,经过一年多的装调已正常运转。本文概述此镀膜机的特点及其装调过程。一、镀膜机主体它的特点是:有一套程序控制的抽气系统和由膜厚、蒸发速率测定装置自动控制的电阻式热蒸发源,以及一系列联锁保护装置。1.程序控制自动抽气系统。
Japan EBV-6DA coating machine is a special coating of modern optical coating machine. It uses a fully automatic program-controlled extraction system; film thickness and rate control system; remaining gas mass spectrometry analysis system and other advanced technologies and a series of security systems. In 1979, I imported one, after more than a year of installation and adjustment has been normal operation. This article outlines the characteristics of this coating machine and its installation process. First, the main features of the coating machine is: a set of program-controlled extraction system and by the film thickness, evaporation rate measurement device automatically controlled resistance thermal evaporation source, and a series of interlock protection device. 1. Program control automatic exhaust system.