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改善碳纳米管与金属电极的电接触是实现纳米器件的基础。基于电子隧穿效应的基本原理以及碳纳米管与金属表面接触的模型,得到了两者的接触间隙和接触长度是影响接触电阻的两个重要因素。通过接触电阻测量实验,比较了金电极包覆碳纳米管、钛电极包覆碳纳米管和碳纳米管沉积在金电极上这三种不同接触类型的接触状态,金电极包覆碳纳米管的接触方式具有较小的接触电阻平均值和分散性,接触状态比钛电极包覆碳纳米管和碳纳米管沉积在金电极上两种方式好,其接触电阻平均约为0.062MΩ。
Improving the electrical contact between the carbon nanotubes and the metal electrodes is the basis for realizing the nano devices. Based on the basic principle of electron tunneling and the model of the contact between carbon nanotubes and metal surface, the contact gap and contact length are the two important factors that affect the contact resistance. By contact resistance measurement experiments, the contact states of gold electrode covered carbon nanotubes, titanium electrode covered carbon nanotubes and carbon nanotubes deposited on gold electrodes were compared. The gold electrode coated carbon nanotubes Contact method has a smaller average contact resistance and dispersion, the contact state than the titanium electrode coated carbon nanotubes and carbon nanotubes deposited on the gold electrode in two ways, the average contact resistance of about 0.062MΩ.