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采用磁控溅射方法在石英玻璃上制备了FePd(93 nm)单层膜和FePd(46.5 nm)/Ag(10 nm)/FePd(46.5 nm)多层膜,并在600℃退火不同时间,通过XRD、VSM对薄膜样品的结构和磁性能进行测量。结果发现:FePd单层膜在600℃退火240 min后有序化转变不明显,300 min后部分有序化,360 min后基本上完全有序化,形成了有序面心四方结构的L1_0-FePd相;当热处理时间为420 min时,有最大的面内矫顽力,约为1670 Oe;Ag中间层对溅射态的FePd薄膜衍射峰的形成有抑制作用,Ag中间层的添加可大幅缩短FePd有序化的时间;样品热处理5 min后就开始有序化,热处理15 min后样品性能即可达到最好,有最大的面内矫顽力2660 Oe,但热处理时间过长会使薄膜磁性能变差。
The FePd (93 nm) monolayer and FePd (46.5 nm) / Ag (10 nm) / FePd (46.5 nm) multilayer films were prepared on quartz glass by magnetron sputtering and annealed at 600 ℃ for different time. The structure and magnetic properties of the film samples were measured by XRD and VSM. The results showed that the orderly transformation of the FePd monolayer after annealing at 600 ℃ for 240 min was not obvious. After 300 min, the orderly partialization of the FePd monolayer was complete and was almost completely ordered after 360 min, forming an ordered tetragonal L1_0- FePd phase. When the heat treatment time is 420 min, the maximum in-plane coercive force is about 1670 Oe. Ag intermediate layer can inhibit the formation of sputtered FePd film diffraction peaks. The addition of Ag intermediate layer can be significantly Shorten the ordering time of FePd. The samples began to be ordered after 5 min of heat treatment. After 15 min of heat treatment, the properties of the samples reached the best, with the maximum in-plane coercivity of 2660 Oe. However, if the heat treatment time was too long, Magnetic properties deteriorate.