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综述了真空微电子学这一新兴学科的研究方向和主要内容，基本的理论基础，总结了近年来国内外在模拟数值计算和工艺实践中报道的对现有理论体系的一些补充性成果，以期对该学科有一比较完整的了解和认识。
This paper summarizes the research direction and main contents of the emerging discipline of vacuum microelectronics and the basic theoretical foundations and summarizes some complementary achievements of the existing theoretical system reported in the field of numerical simulation and process practice at home and abroad in recent years The discipline has a more complete understanding and understanding.