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(超)浅结制造技术是当今VLSI/ULSI的关键技术之一,本文分析了该技术中牵涉到的几个问题,在对当前国外流行的几种实用方法评估对比的基础上,就该技术目前的状况以及今后的发展趋势作一综合论述。
(Super) shallow junction manufacturing technology is one of the key technologies of VLSI / ULSI today. This article analyzes several issues involved in this technology, and based on the comparison of several popular evaluation methods currently available in foreign countries, The current situation and future trends for a comprehensive discussion.