论文部分内容阅读
在惯性约束聚变(ICF)装置中,大量使用有变频特性的水溶性磷酸二氢钾(KDP)类晶体材料,但KDP晶体需要有效的保护膜防止其潮解。由于KDP晶体元件晶相转变温度低,对湿度比较敏感,在很大的程度上限制了膜层制备和后处理工艺。以甲基三乙氧基硅烷(MTES)为原料,采用溶胶-凝胶技术和提拉方式制作防潮膜,仅仅以100℃以下温度进行热处理,再以正硅酸乙酯(TEOS)为原料,在镀有热处理后的防潮膜的基底上采用上述工艺镀制光学减反膜。对组合薄膜的防潮、光学性能、结构等进行了测试表征。结果显示防潮性能佳,而且在特定波长532nm有高达99.76%的透过率。薄膜中存在大量的甲基(—CH3),是性能优良的且能在较低的温度下进行制备的防潮增透膜,可用于三倍频晶体KDP的增透与保护。
In inertial confinement fusion (ICF) devices, water-soluble potassium dihydrogen phosphate (KDP) -based crystal materials with frequency conversion properties are widely used, but KDP crystals require an effective protective film against deliquescence. Due to the low crystal phase transition temperature of KDP crystal element, it is more sensitive to humidity, which greatly limits the film preparation and post-treatment process. Using methyltriethoxysilane (MTES) as raw material, a moisture-proof film was prepared by sol-gel technique and pulling method, heat treatment was carried out only at the temperature below 100 ℃, and TEOS was used as raw material, The optical anti-reflection film is plated on the substrate coated with the heat-treated moisture-proof film by the above process. Moisture-proof, optical properties, structure, etc. of the combination film were tested and characterized. The results show good moisture resistance, and at a specific wavelength of 532nm up to 99.76% transmittance. There is a large amount of methyl (-CH3) in the film, which is a moisture-proof AR coating with excellent performance and can be prepared at a lower temperature. It can be used to enhance and protect the triplet crystal KDP.